Mass-producible optical guided-wave devices fabricated by photopolymerization

摘要

Abstract: Mass-producible optical waveguide devices and their fabrication method for integrated optics are described. Single-mode polymer rib waveguides and grating couplers in planar polymer waveguides which are a key component for organic integrated optical devices have been successfully developed by using photopolymerization (2P) method. The method is based on an electron-beam lithography technique for writing original patterns and a replicating technique using a molding stamper. !9