DESIGN, FABRICATION, MEASUREMENT AND MODELING OF EMBEDDED INDUCTORS IN LAMINATE TECHNOLOGY

摘要

In this paper, several planar embedded inductors whose measured quality factors range from 20 to 90 were characterized in the frequency domain. The inductors were designed on FR-4 board using MCM-L technology with two metal layers and measured using TDR (Time Domain Reflectometry). Using the scattering parameters extracted from TDR measurements, scalable models were developed using the multidimensional cauchy method. A selective sampling algorithm was also investigated for developing the scalable models using electromagnetic (EM) simulation.