Design and Fabrication of Multichannel Tunable Photodetector Array

摘要

A long wavelength multichannel tunable photodetector array was fabricated based on multistep Fabry-Perot filter by using the heteroepitaxy growth of InP-In_(0.53)Ga_(0.47)As-InP PIN structure on a GaAs based GaAs/AlAs Fabry-Perot filter structure. High quality heteroepitaxy was realized by employing a thin low temperature buffer layer. The array can detect multiple channels, and the tuning range of each detector is about 10nm. A spectral linewidth of 0.5nm, a quantum efficiency over 25%, and a 3dB bandwidth of 9.2GHz were simultaneously obtained.