Design and Fabrication of Multichannel Tunable Photodetector Array

摘要

A long-wavelength multichannel tunable photodetector array was fabricated based on multistep Fabry-Pérot filter and thermal-optic effect. The array can detect multiple channels, and the tuning range of each detector is 10nm. A spectral linewidth of 0.5nm, a quantum efficiency over 27%, and a 3dB bandwidth of 9.2GHz were simultaneously obtained.