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Hybrid integration platform based on silica-on-silicon planar lightwave circuit

机译:基于硅基硅平面光波电路的混合集成平台

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摘要

While silica waveguide PLC products have been deployed in various systems and applications, hybrid integration of semiconductor opto-electronic devices on silica-based planar lightwave circuit (PLC) has become the mainstream platform for small form factor, low-cost and high volume integrated transceiver modules. One of the main benefits of hybrid integration is the wafer-scale process, which greatly reduces chip/module size and assembly cost. This paper reviews the development of this technology, and as an example, presents a hybrid integrated transmitter with four wavelengths on silica PLC chip for LX4 and 10GbE applications.
机译:尽管二氧化硅波导PLC产品已部署到各种系统和应用中,但半导体光电器件在基于二氧化硅的平面光波电路(PLC)上的混合集成已成为小尺寸,低成本和大批量集成收发器的主流平台模块。混合集成的主要优点之一是晶圆级工艺,该工艺可大大减少芯片/模块的尺寸和组装成本。本文回顾了该技术的发展,并举例说明了在LX4和10GbE应用的二氧化硅PLC芯片上具有四个波长的混合集成发射机。

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