All Optically-Driven MEMS Deformable Device via a Photodetector Array

摘要

In this paper we demonstrate the first optical actuation of a single-pixel, deformable-mirror MEMS device through a direct cascade with a photodetector. Photovoltaic, p-i-n, and avalanche photodetectors were successfully utilized. Mirror deformations were monitored by interferometry. Deformation is quasilinear at low light intensities, and saturates at higher intensities. Actuation at picowatt light intensities has been accomplished by cascading with an avalanche photodetector. We also describe the fabrication of an integrated device consisting of an all optically addressed deformable-mirror MEMS suspended over a p-i-n photodetector. Initial demonstration of optical actuation of the deformable mirror using the newly integrated device is also presented.