MOEMS Gyroscope based on acoustooptic mode coupling

机译：基于声光模耦合的MOEMS陀螺仪

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A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscopernwas designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg_(-1)s_(-1) in the angular rate range of CMOOdeg/s.

机译：设计了一种新型的微光机电系统陀螺仪。在XY LiNbO3衬底上集成了光波导衍射元件，电光调制器和表面声波（SAW）传感器等。在CMOOdeg / s的角速率范围内，获得的灵敏度为12 uVdeg _（-1）s _（-1）。

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来源
《Optical sensors and biophotonics II》|2010年|p.79900I.1-79900I.6|共6页
会议地点 Shanghai(CN)
作者
Shu-xiang Lu; Shu-fen Chen; Yi Zhao;
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作者单位

Department of Opto-Electronics Engineering, Beijing Institute of Technology, Beijing 100081,China;

Department of Opto-Electronics Engineering, Beijing Institute of Technology, Beijing 100081,China;

Department of Opto-Electronics Engineering, Beijing Institute of Technology, Beijing 100081,China;

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原文格式 PDF
正文语种 eng
中图分类光波通信、激光通信;
关键词
MOEMS; Surface Acoustic Wave; gyroscope;

机译：MOEMS；表面声波;陀螺仪;

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MOEMS Gyroscope based on acoustooptic mode coupling

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