Improved Rate Control for E-beam Evaporation andEvaluation of Optical Performance Improvements

机译：改进的电子束蒸发速率控制和光学性能改进评估

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摘要

A new deposition rate control and E-gun strategy has been developed whichrnsignificantly reduces the growth rate variations for E-beam deposited SiO2 coatings. The reducedrngrowth variations are shown to greatly improve the optical performances of two multilayeredrnbandpass filters.

机译：已经开发了一种新的沉积速率控制和电子枪策略，该策略显着降低了电子束沉积SiO2涂层的生长速率变化。减小的生长变化被显示为极大地改善了两个多层带通滤波器的光学性能。

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《Optical interference coatings: technical digest》|2004年|1-3|共3页
会议地点 Tucson AZ(US)
作者
Michael Gevelber; Bing Xu; Douglas Smith;
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作者单位

Manufacturing Engineering Department, Boston University, 15 Saint Mary's Street, Brookline, Massachusetts, 02446rngevelber@bu.edu;

Manufacturing Engineering Department, Boston University, 15 Saint Mary's Street, Brookline, Massachusetts, 02446;

Vacuum Process Technology Inc., 70 Industrial Park Road, Plymouth, Massachusetts, 02360;

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专利

1. Improved rate control for electron-beam evaporation and evaluation of optical performance improvements [J] . Michael Gevelber, Bing Xu, Douglas Smith Applied Optics . 2006,第7期

机译：改进的电子束蒸发速率控制和光学性能评估
2. Improved rate control for electron-beam evaporation and evaluation of optical performance improvements [J] . Michael Gevelber, Bing Xu, Douglas Smith Applied optics . 2006,第7期

机译：改进的电子束蒸发速率控制和光学性能评估
3. Experimental study of sweep control in e-beam evaporated optical coatings [J] . 王宁, 邵建达, 易葵, 中国光学快报：英文版 . 2010,第006期

机译：电子束蒸发光学镀膜扫掠控制的实验研究
4. Improved Rate Control for E-beam Evaporation and Evaluation of Optical Performance Improvements [C] . Optical Society of America topical meeting and tabletop exhibit . 2004

机译：改进的电子束蒸发速率控制和光学性能改进的评估
5. A performance improvement intervention to improve college completion rates: A qualitative research study. [D] . Riney, Tonya L. 2017

机译：一项提高大学完成率的绩效改进干预措施：一项定性研究。
6. Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption [O] . Lukasz Skowronski, Arkadiusz Ciesielski, Aleksandra Olszewska, 2020

机译：电子束蒸发氧化锌膜的微观结构和光学性能 - 分解和表面解吸的影响
7. Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films—Effects of Decomposition and Surface Desorption [O] . Lukasz Skowronski, Arkadiusz Ciesielski, Aleksandra Olszewska, 2020

机译：电子束蒸发氧化锌膜的微观结构和光学性能 - 分解和表面解吸的影响

Improved Rate Control for E-beam Evaporation andEvaluation of Optical Performance Improvements

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