Laser scan microscope and infrared laser scan microcope: two important tools for device testing

摘要

Abstract: The optical beam induced current (OBIC) produced in devices by a laser scan microscope (LSM) is used to localize hot spots, leakage currents, electrostatic discharge defects and weak points. The LSM also allows photoluminescence measurements with high spatial and energy resolution. Using the infrared laser scan microscope (IR LSM), defects in the metallization and latch-up sensitive region could be detected from the back of the device.!