Abstract: Laser beam scanning was applied for evaluating the distribution of sheet resistance of solar cell emitter. It was shown that the voltage drop around the illuminated spot has an information about the local sheet resistance since the most part of the voltage drop occurs near the illuminated area. The current under local illumination in reverse direction depends on the local quantum efficiency while in forward direction it depends on the same local properties and on the local sheet resistance. The processing of laser beam induced current images at different bias voltage gives a map of local sheet resistance complementing other techniques for investigation the electron devices. We investigated one and dual-beam technique for amplitude and phase LBIC measurement by means of universal laser scanning microscope worked in amplitude and differential-phase regimes. Acousto-optical scanning results in 2D distribution of amplitude or phase LBIC. For convenience of image processing and visualization, TV type scanning is applied to laser beams.!6
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