Design of Temperature Matrix with Direction Sensitivity

摘要

The paper describes design of an anemometric sensor system for measurement of velocity and direction of airflow over a chip. A CMOS transistor has been used as the temperature sensor. Temperature "heater" has been designed as an integrated resistor. The direction of airflow is computed from the orthogonal arrangement of temperature matrix. The matrix is composed of two pairs of temperature sensors connected with the "heaters". Each sensor contains 9 NMOS transistors. The transistors work in the mode of strong inversion (overthreshold area). The airflow is cooling the "heaters" and is heated at the same time. Two output voltages from the analogue part represent the vector of airflow in x and y axes. The angle and velocity of the airflow are computed from these output voltages. The computation is performed in the digital part. WinSPICE and MATLAB have been used for design and simulation. Models have been used for design and modelling.