A Novel X-ray Microtomography System with High Resolution and Throughput

摘要

The large penetration depth and rich contrast mechanisms of x rays makes it ideal for non-destructive or non-invasive imaging applications. Projection-type x-ray micro-imaging systems are widely used in micro- and nano-technology industries to study the internal structures of manufactured components such as micro-electro-mechanical (MEM) or semiconductor devices. The resolution of these system is typically determined by the size of the x-ray source. As a consequence, a small x-ray source size and high magnification are required to achieve high resolution. Since both factors reduce the detectable flux, a compromise between the resolution and the throughput must be made. Based on its innovative high-resolution detector, Xradia has developed a new system, the microXCT, that solves this problem by using a unique optical design. It is able to acquire images with 1-micormeter resolution in an exposure time of a few seconds. This instrument includes a fully automated tomographic data acquisition and reconstruction capability for an user to study the 3D structure of a sample at micrometer three-dimensional resolution. This system's unique capability of imaging at high-resolution with minimal compromise in the throughput makes it a valuable tool in non-destructive imaging applications in microtechnology and biotechnology.