Spatial resolution of synchrotron x-ray microtomography in high energy range: Effect of x-ray energy and sample-to-detector distance

摘要

Spatial resolution of three-dimensional images obtained by synchrotron X-ray microtomography technique is evaluated using cyclic bar patterns machined on a steel wire. Influences of X-ray energy and the sample-to-detector distance on spatial resolution were investigated. High X-ray energies of 33-78 keV are applied due to the high X-ray absorption of transition metals. Best spatial resolution of about 1.2 μm pitch was observed at the sample-to-detector distance range of 20-110 mm and at the energy range of 68-78 keV. Several factors such as X-ray scattering and diffraction phenomena affecting the degradation of spatial resolution are also discussed.