The Study of Diffraction Optical Element Applied to Resonant Cavity LED

摘要

A state-of-the-art strategy in developing novel technologies is offered in this paper. Using MEMS, resonant cavity LED (RCLED) and DOE processes, one can manufacture an integrated optoelectronic semiconductor device. Using MEMS process to implement the surface topology of the DOE on the diffraction layer of the resonant cavity LED, the chiseled RCLED will become as a DOE-RCLED. The DOE-RCLED can be used to control the energy distribution of the emitted light. In this paper, the scalar diffraction principle and Dammann grating are used to design a special LED of which the emitted light can be focused on an optical fiber.