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The Study of Diffraction Optical Element Applied to Resonant Cavity LED

机译:衍射光学元件的研究应用于谐振腔LED

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A state-of-the-art strategy in developing novel technologies is offered in this paper. Using MEMS, resonant cavity LED (RCLED) and DOE processes, one can manufacture an integrated optoelectronic semiconductor device. Using MEMS process to implement the surface topology of the DOE on the diffraction layer of the resonant cavity LED, the chiseled RCLED will become as a DOE-RCLED. The DOE-RCLED can be used to control the energy distribution of the emitted light. In this paper, the scalar diffraction principle and Dammann grating are used to design a special LED of which the emitted light can be focused on an optical fiber.
机译:本文提供了开发新型技术的最先进的战略。使用MEMS,谐振腔LED(RCLED)和DOE工艺,可以制造集成光电子半导体器件。使用MEMS过程在谐振腔LED的衍射层上实现DOE的表面拓扑,凿式旋转将变为DOE-RCLED。 DOE-RCLED可用于控制发出光的能量分布。在本文中,使用标量衍射原理和DAMMANN光栅来设计一种特殊的LED,所述特殊LED可以聚焦在光纤上。

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