149.8 nm, the shortest wavelength generated by phase matching in nonlinear crystals

摘要

Narrow band light sources in the vacuum ultraviolet (VUV) region are attractive for photo lithography and high resolution photoelectron spectroscopy. Phase matching is essential to generate high power VUV lights by using a narrow band, low peak intensity and nanosecond pump source. In this research, sum frequency mixing has been demonstrated below 150 nm in KBe_2BO_3F_2 by using the fundamental with its fourth harmonic of a 6 kHz Ti:sapphire laser. The laser system we have developed in this research, consists of a Ti:sapphire laser system and a frequency conversion stage. We generated 149.8-nm radiation, which is the shortest wavelength ever obtained to our knowledge by phase matching in nonlinear crystals. The fifth harmonic output powers were 3.6 μW at 149.8 nm and 110 μW at 154.0 nm, respectively. The phase matching angles measured from 149.8 nm to 158.1 nm are larger by 3-4 degrees than those expected from the existing Sellmeier equation. The optical transmission spectra of some KBBF crystals were measured by the spectrophotometer. The transmittance near the absorption edge supports the generation of coherent radiation below 150 nm. The improvement of a prism-coupled device contributed to the generation of coherent radiation below 150 nm. Another reason for the present break through to the shorter wavelength is the use of the short pulse driving source compared with our previous research.