HIGH POWER UV AND VUV EXCILAMPS

摘要

Last time interest in design and development of new types of UV and VUV spontaneous radiation sources, in particular excilamps, has considerably grown. Excilamps are essentially more simple in design and operation as compared to excimer lasers, and emit in wider range of wavelengths. The most efficient excilamps on transitions of rare gas dimers R_2~* and rare gas monohalides RX~* can find wide industrial application. Therefore improving of their output parameters is of great importance. In this paper, the output parameters of excilamps with different geometry pumped by capacitive discharge, barrier discharges, glow discharges and UV preionized discharge are presented. The paper reviews the experimental results obtained at the High Current Electronics Institute.