High average power VUV and UV excilamps

摘要

In the present paper, the review of the basic results obtained at the Laboratory of Optical Radiation at High Current Electronics Institute SB RAS during 2008-2010 years is presented. Efficient radiation of Ar_2, Kr_2, Xe_2, KrBr~*, KrCl~*, Xel~*, XeBr~*, XeCl~*, Cl_2~* molecules and I atoms was obtained in rare gas or in rare gas - Br_2 (Cl_2,I_2) mixtures.