High Power UV and VUV Excilamps and Their Applications

摘要

In the present paper, the review of the basic results obtained at the Laboratory of Optical Radiation at High Current Electronics Institute SB RAS during 2007-2009 years is presented. Efficient radiation of Ar_2, Kr_2, Xe_2, KrBr~*, KrCl~*, Xel~*, XeBr~*, XeCl~*, CI_2~* molecules and I atoms was obtained in rare gas or in rare gas-Br_2 (Cl_2, I_2) mixtures. Study of radiation parameters and lifetime period of the manufactured barrier discharge excilamps has been performed.