Improved Electron Emission Characteristics of BSD (Ballistic Electron Surface-Emitting Display) on a Glass Substrate Fabricated with Low Temperature Process

摘要

Ballistic electron Surface-emitting Display (BSD) is fabricated on a PDP glass substrate with low temperature process. Electrochemical oxidation (ECO) technique is introduced to reduce process temperature. Electron emission characteristics are improved with annealing at 550℃ after ECO process. It is found that eliminating H_2O species from ECO-formed SiO_2 is crucial to improve electron emission characteristics. Thermal durability is also evaluated and no degradation is observed after vacuum encapsulation process with frit sealing at the temperature of 410℃ in N_2 gas. Vacuum encapsulated BSD model is fabricated using frit sealing and electron emission pattern is observed.