Physical Characterization of Zirconium-Doped Zinc Oxide Thin Films Deposited by Spray Pyrolysis

摘要

Zinc oxide thin films doped with zirconium were prepared from solutions with doping material dispersed at several concentrations and usign the spray pyrolysis technique. The films were deposited over sodocalcic glasses at different substrate temperatures. Effects of doping material concentration an substrate temperatures on electrical, optical, structural and morphological film properties are presented. Results show an evolution in morphology and grains size as the doping concentration is increased. Preferential growth in the (002) orientation was detected for each thin film from X ray diffractograms.