High-resolution 3D woodpile structures by direct fs laser writing

摘要

A novel organic-inorganic hybrid material is presented containing a quenching moiety for improving the resolution ofDirect femtosecond Laser Writing by multi-photon polymerization. By exploiting the diffusion of the quencher moleculefor confining radical diffusion in the scanned area, sub-100nm resolution is achieved. 3D woodpile structures with rodspacing of 400nm are successfully fabricated. We optically characterize these woodpiles structures and we show thatthey exhibit well-ordered diffraction patterns and stopgaps down to near-infrared wavelengths.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.