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Use of a dispenser attachment and dispenser attachment for a device for writing 3D structures by means of laser lithography
Use of a dispenser attachment and dispenser attachment for a device for writing 3D structures by means of laser lithography
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机译:分配器附件和分配器附件在通过激光光刻技术写入3D结构的设备中的用途
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摘要
The invention relates to a use of a dispenser attachment (38), in particular a dispenser attachment (38) for microscopy objectives, in a device (10) for writing three-dimensional structures by means of laser lithography in a lithographic fluid (22) which is irradiated by irradiation Laser light is solidifiable. The invention also relates to a dispenser attachment (38) adapted for placement on a lens (18).
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