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Use of a dispenser attachment and dispenser attachment for a device for writing 3D structures by means of laser lithography

机译:分配器附件和分配器附件在通过激光光刻技术写入3D结构的设备中的用途

摘要

The invention relates to a use of a dispenser attachment (38), in particular a dispenser attachment (38) for microscopy objectives, in a device (10) for writing three-dimensional structures by means of laser lithography in a lithographic fluid (22) which is irradiated by irradiation Laser light is solidifiable. The invention also relates to a dispenser attachment (38) adapted for placement on a lens (18).
机译:本发明涉及分配器附件(38),特别是用于显微物镜的分配器附件(38)在设备(10)中的用途,该设备用于通过激光光刻在光刻液(22)中书写三维结构。通过照射来照射激光是可固化的。本发明还涉及一种适于放置在镜片(18)上的分配器附件(38)。

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