On the mechanical behavior of LIGA nickel

摘要

We get the mechanical behavior of pure nickel material produced by the LIGA method in Institute of High Energy Physics Chinese Academy of Sciences through tensile tests. The average Young's modulus is 215 GPa, which is almost exactly the same as measured on the device, NanoIndentation. And the LIGA nickel material has yield and ultimate strengths on the order of 1049 MPa and 1448 MPa respectively. After comparing, we get they are all bigger, especially the yield and ultimate strengths, than that obtained previously by other MEMS research organizations.