Challenges and Needs for Automating Nano Image Processing for Material Characterization

摘要

Image processing techniques are needed to extract critical information pertinent to nano material characterization but the current processing methods are slow, expensive and labor intensive. There is a strong need to develop fast and reliable methods, enabling process control compatible automated processing of nano images. The authors believe specialized techniques are needed to address the challenges, and will discuss the recent development of nano image processing methods as well as the near- and medium-terms needs in the area of nano metrology and imaging. The authors will share their broad perspectives on this research direction.