PASSIVE CALIBRATION-VAPOR SOURCE FOR A MICRO GAS CHROMATOGRAPH

摘要

Micro-electro-mechanical systems (MEMS) fabrication techniques have been used to create a calibration-vapor source for a micro gas chromatograph (μGC) that employs a porous silicon (PS) reservoir and continuously generates a known quantity of n-decane by passive diffusion through a DRIE-Si channel. Sources containing PS layers with vertical pores 3 +- 0.6 μm (diam.) x 280 μm (depth) provided an average generation rate at 25℃ within 5% of theoretical predictions. The temperature dependence of the n-decane generation rate (10-60℃) was slightly higher than predicted. Results indicate that this source design is suitable for extended μGC field deployment.