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Quasi-continuous mask-coding method for fabricating diffractive optical elements

机译:用于制造衍射光学元件的准连续掩模编码方法

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Abstract: Based on the analysis of the effect of fabrication errors on diffraction efficiency of a diffractive optical element and image quality of a binary optical lens (BOL), a novel quasi- continuous mask-coding (QCMC) method is presented in this paper. This coding method puts forward a series of new mask patterns, making it possible to fabricate quasi-continuous micro profile by using the same number of masks as employed in the traditional `binary' fabrication technology. The QCMC technique breaks through the current convention for coding m masks to get the micro profile with 2$+m$/ steps in one zone. This paper presents the theory of the QCMC method and provides examples of practical mask patterns. by using QCMC, BOLs with enhanced diffraction efficiency can be fabricated by traditional multilayer micro fabrication method or by laser writing technology without any additional equipment or processing procedure. Employing this method will enhance the diffraction efficiency, the optical performance, and in particular the image quality of a hybrid optical imaging system.!17
机译:摘要:在分析制造误差对衍射光学元件的衍射效率和二元光学透镜(BOL)图像质量的影响的基础上,提出了一种新的准连续掩模编码(QCMC)方法。这种编码方法提出了一系列新的掩模图案,从而可以通过使用与传统“二进制”制造技术中使用的掩模数量相同的掩模来制造准连续的微轮廓。 QCMC技术突破了目前对m个掩模进行编码以在一个区域中以2 $ + m $ /步长获得微轮廓的惯例。本文介绍了QCMC方法的理论,并提供了实际的掩模图案示例。通过使用QCMC,可以通过传统的多层微制造方法或通过激光写入技术来制造具有增强的衍射效率的BOL,而无需任何其他设备或处理程序。采用这种方法将提高混合光学成像系统的衍射效率,光学性能,尤其是图像质量。17

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