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DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRICATING THE OPTICAL HOMOGENIZER
DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRICATING THE OPTICAL HOMOGENIZER
A diffractive optical element efficiently converts an input light beam into an output light beam having a specified cross-sectional shape. The diffractive optical element includes a plurality of partial optical elements. The plurality of partial optical elements convert the input light beam to respective partial light beams, each of which has a shape that does not correspond to the specified cross-sectional shape. The sum of the partial light beams matches the shape of the output light beam (i.e., having the specified cross-sectional shape).
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