Acoustic whispering gallery mode resonator with Q > 109,000 at 515MHz

摘要

A capacitive-gap transduced micromechanical resonator design based on an acoustic whispering gallery mode (WGM) constructed in micro-crystalline diamond has achieved a Q >109,000 at 515MHz, posting an f·Q product of >5.6×10¹³. The key to this performance is anchor-loss nulling by the WGM, as evidenced by comparison of Q values between radial-contour modes and WGM ones on the same disk device, where a 2–3× enhancement of Q is observed. Q''s exceeding 100,000 should enable unprecedented RF front-end frequency selectivity and low phase noise oscillators for future communications.