STUDIES ON THIN FILMS (DIELECTRIC AND METALLIC) CONSTITUTING MICRO THERMO- MECHANICAL SENSORS TO BE EMBEDDED IN METAL STRUCTURES

摘要

It is of interest to obtain the thermomechanical response of tools, equipment, and structural components in a real manufacturing environment. Microfabricated thin film thermocouples and strain gages are attractive for their small size and fast response. It is novel and challenging to fabricate these sensors on metal substrate and finally embed them into location of interest. Consequently, the materials (dielectric and metallic) constituting the sensor need to be characterized and optimized properly for reliability. We present here results of characterization and optimization of materials making a thermomechanical sensor to be embedded in metal structure.