A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

摘要

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm × 1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115 V. The influence function on the nearest neighbor is 51 %. The fill factor of the DM is 99.9%.