Development of a novel optical alignment system for accurate leveling adjustment of a high-precision chip mounter

摘要

Automatic high-precision chip mounter have been applied frequently in high-precision and complex craft situations. The key to the equipment is the vision alignment system. The leveling adjustment is the important part and preconditin of the alignment. On the basis of a correlative leveling adjustment technlogy, a novel optical alignment system for leveling adjustment is presented. Its optical system is designed and its flow of image processing is discussed. To avoid the influence of interference, the polarization of the light is used skillfully in the optical system. The result of simulated experiments of the reticle-mark collected by a charge couple device (CCD) indicates that the system can meet the precision needs of an automatic chip mounter vision alignment system and it is reasonable.