Modelling Microbolometer using Matlab/SIMULINK package with thermal noise sources

摘要

Infrared radiation microdetectors become a concern for many scientists, because of their wide capability application in industry. Microbolometers are good example of resistive microdetectors belonging to large family of MEMS devices. Electro-thermal models are commonly used in simulations and designing MEMS devices, also in microbolometers modelling and analyzing of performance. It is crucial to build the most detailed model as possible with mutual electric and thermal domains influence for carrying out simulations and detect all phenomena. During modeling creation it is important to notice that Microbolometers detection capability is limited by fluctuation of various noise sources which have random nature. This article presents theoretical background of circuit modelling, with thermal noise sources taken into consideration.