Study of component noise of a digital MEMS gyroscope

摘要

In this paper we present the result of the analysis of the main sources of errors of a commercial low-cost 3-axis MEMS gyroscopes. The theoretical parameters that describe the effect of noise are obtained by means of Power Spectral Density (PSD) and the Allan Variance (AV) techniques. This analysis was applied to the signals acquired simultaneously from a set of ten identical devices, aligned and fixed together. The validation of each type of sensor, and ideally of each single device, before its application is of great importance. In fact, even though identically manufactured, all the industrial device has a variable behaviour. Nowadays, MEMS gyroscopes are widely employed in several applications in a wide range of fields such as robotics, automation, automotive, and monitoring of natural and artificial environments.