KrF laser with a power of 100 W

摘要

The development of effective discharge pulse-repetition KrF laser is informed. Research the possibility of forming in this laser long laser pulse with input pump energy for a few half periods of the discharge current are presented. In the repetitively pulsed regime (up to 100 Hz) laser provides laser pulses with energy of 1 J and duration of 60 ns at the base. The maximum total efficiency of the laser is 3%. The results of studies on the formation in this laser of narrowband radiation with a wide spectral band tuning are reported. The possibility of forming a radiation pulse with a linewidth 2 pm, energy 0.15 J and spectral tuning region 247.5-249.6 nm are demonstrated.