A Novel Nonlinearity Reduction Method in Disk Resonator Gyroscopes Based on Thevibration Amplification Effect

摘要

This paper shows a novel method to reduce electrostatic and capacitive nonlinearities in disk resonator gyroscopes (DRGs) via electrodes distribution optimization. Based on the vibration amplification effect in the DRG’s working mode, we found that by optimizing the positions of driving and sensing electrodes, nonlinearity of the DRG can be effectively reduced and oscillation amplitude x0 can be greatly improved to break the nonlinear limit. To verify this method, multi-layer driving electrodes are designed and effects of their positions on the DRG’s nonlinearity are analyzed and experimentally tested. The results show that x0 and sensitivity of the DRG can be increased significantly. Meanwhile, the angle random walk (ARW) and bias instability (BI) of the DRG can be reduced by 53% and 63% respectively.