Multi-layer Microstructure of Sol-Gel Barium Titanate Thin Films for Optical Waveguide Applications

摘要

Barium titanate(BaTiO_3) thin films are suitable for many application especially photonics. BaTiO_3 thin films are deposited using spin coating with an optimum spin speed of 4500rpm. The samples are then characterized using XRD, AFM and SEM. The results of the XRD analysis showed that both the 5- and 10-coated layers are polycrystalline BaTiO_3 with differences in terms of diffraction intensity, due to the number of layers. As for optical application, the surface roughness is the most crucial part. The number of layers of 5 and 10 have thickness of 2.927nm and 4.456nm RMS.