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ZnO nano-rod based hydrogen sensor

机译:ZnO纳米棒的氢气传感器

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摘要

We report on the fabrication of Zinc Oxide (ZnO) nanorod based H2 sensor using a simple chemical route. ZnO films were deposited on Si substrate followed by annealing and used to detect hydrogen. The surface morphology and crystal structure of the fabricated ZnO system was investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The gas sensing of H2 in the concentration range 0.1–1 vol % in dry air was studied using current-voltage measurements. Gas sensing mechanism is discussed.
机译:我们使用简单的化学途径报告基于氧化锌(ZnO)纳米棒的H 2 传感器的制备。 ZnO膜沉积在Si衬底上,然后退火并用于检测氢。 通过扫描电子显微镜(SEM)和X射线衍射(XRD)研究了制造的ZnO系统的表面形态和晶体结构。 使用电流 - 电压测量研究了在干燥空气中浓度范围0.1-1Vol%的H 2

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