A ZnO nanorod based layered ZnO/64° YX LiNbO_3 SAW hydrogen gas sensor

摘要

A zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) sensor has been developed and investigated towards hydrogen (H_2) gas. The ZnO nanorods were deposited onto a layered ZnO/64° YX LiNbO_3 substrate using a liquid solution method. Micro-characterization results revealed that the diameters of ZnO nanorods are around 100 and 40 nm on LiNbO_3 and Au (metallization for electrodes), respectively. The sensor was exposed to different concentrations of H_2 in synthetic air at operating temperatures between 200 ℃ and 300 ℃. The study showed that the sensor responded with highest frequency shift at 265 ℃. At this temperature, stable baseline and fast response and recovery were observed.