We developed a pneumatic high precise position controllable servo valve for a pneumatic precise positioning system. To improve the performance of a pneumatic, improvement of the servo valve characteristic is essential because the system performance is dominated by it. This valve is not affected by friction force because an air bearing is mounted on sliding surfaces of the valve. Furthermore, this valve has a high-resolution position sensor to accurately control the spool position. We analyzed characteristics of this valve to design the optimum digital controller. Then, the digital controller was designed. Furthermore, the characteristic experiment of this valve was done to confirm the effectiveness of the controller.
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