A zone melting heater (ZMH) was used for oriented recrystallization of thin Si layers which were deposited on different encapsulated ceramic as well as on graphite substrates. The encapsulation consisted of high quality SiO2 and SiNx layers deposited by plasma enhanced chemical vapor deposition (PECVD). The mechanical stability of such SiO2 and SiNx layer systems as well as the diffusion of electrically active impurities out of the substrate through these layers were investigated. A newly designed moveable large area heater (LAH) with halogen lamps mounted perpendicular to the scanning direction was used to recrystallize thin Si layers deposited on various mc- and ribbon-Si substrates covered with perforated SiO2 intermediate layers. An algorithm to detect the melting point automatically was developed and homogeneous recrystallization out of these seeding holes could be achieved
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机译:区域熔化加热器(ZMH)用于取向薄Si层的重结晶,薄Si层沉积在不同包封的陶瓷以及石墨底物上。 通过等离子体增强的化学气相沉积(PECVD)沉积的高质量SiO 2 sub>和Sin x sub>层组成的封装。 研究了这种SiO 2 sub>和SIN X / sub>层系统的机械稳定性以及通过这些层扩散通过这些层的底物中的电活性杂质的扩散。 具有垂直于扫描方向安装的卤素灯的新设计的可移动大型区域加热器(LAH)用于重结晶沉积在覆盖有多孔SiO 2 Sub>中间层的各种MC和带状基板上的薄Si层 。 可以实现自动检测熔点的算法,并且可以实现这些播种孔的均匀再结晶
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