New grwoth methods of ZnO nano structures fully compatible with the bio-chemical sensor platforms

摘要

New fabrication method of ZnO nano structures using radio-frequency sputter deposition is developed for the fabrication of bio-chemical sensing materials that are fully compatible with complementary metal-oxide-semiconductor fileld-effect-transistor (CMOS-FET) based sensor platforms. The effects of growth conditions, such as O₂/Ar ratio and growth time, on the growth shapes of ZnO are investigated. ZnO nano structures grown at room temperatue on the surface of polycrystalline metal particles were found to be multi-phase polycrystalline. Crystallinity and preferred direction of ZnO varied with increasing O₂/Ar ratio and growth time. The atomic % of oxygen in ZnO increased and oxygen-excess occurred with increasing O₂/Ar ratio and growth time.