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PREPARATION OF GIANT MAGNETOSTRICTIVE THIN FILM FOR OPTICAL SCANNER

机译:用于光学扫描仪的巨型磁致伸缩薄膜的制备

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摘要

The optical scanning device, which was consisted of TbFe_(1.7) thin film, Silicon wafer mirror and polyimide substrate, was studied. It was found that the device showed linearity and reproducibility in range of magnetic field from 0 kOe to 5 kOe. The scanning area was also enlarged monotonously with increasing the magnetic field. Therefore, the optical scanning device could be developed for practical use.
机译:研究由TBFE_(1.7)薄膜,硅晶片镜和聚酰亚胺衬底组成的光学扫描装置。 发现该器件显示出从0ko到5 koe的磁场范围内的线性和再现性。 随着磁场增加扫描区域也被单调地放大。 因此,可以开发光学扫描装置以用于实际使用。

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