Real-Time X-ray Scatteirng Study of Surface Dynamics on Au(111) During Ar~+ Ion Irradiation

摘要

X-ray scattering is used to ivnestigate the surface dynamics on Au(111) during Ar~+ ion irradiation. During 500 eV Ar~+ ion irradiatiion, we observe the three regimes of step retraction, quasi-layer-by-layer removal and three dimensional rough erosion, analagous to molecular beam epitaxy. The quasi-layer-by-layer sputtering regime has been studied to identify similarities and differences in surface evolution during ion irradiation and molecular eam epitaxy. X-ray measurements suggest that 500 eV Ar~+ ion irradiation does not lead to stable adatom island formation. Also, in contrast to molecular beam epitaxy, adatom detachment and diffusion seems important in describing the surface kinetics during ion irradiation.