1 chip integrated software calibrated CMOS pressure sensor with MCU, A/D convertor, D/A convertor, digital communication port, signal conditioning circuit and temperature sensor

摘要

This paper reports the newly developed 1 chip integrated CMOS pressure sensor, its highly manufacturable fabrication process using SOI substrate, its output characteristics calibrated and compensated by software on MCU with excellent absolute accuracy over wide temperature range, and the calibration system to perform calibration process.