Formation of Fe_2Si Wetting Coating on Si (001) 2×1 and Growth of a Stable Fe Nanolayer: AES and EELS Study

摘要

The structural-phase state of two-dimensional (d = 1 - 3 ML) coatings before and after annealing and that of Fe nanolayers (d = 4 - 10 ML) were investigated on Si (001)2×l by electron spectroscopy methods of Auger-electrons and energy losses. The room (30 °C) and lowed (< 1250 °C) temperatures of the Si (001) substrate and Fe vapor, respectively, were used during Fe deposition. This study showed the following. An ordered two-dimensional 1 × 1 phase of Fe stable up to 600 °C and then a Fe_2Si wetting coating stable at 250 °C form near the thickness 1 ML and 3 ML, respectively. Fe deposition on this Fe_2Si coating leads to the one-after-another formation of the Fe_3Si, the Si-in-Fe solution, and then a stable up to 250 °C Fe nanofilm with segregated Si.