Sputtered molybdenum as conductive material for high-temperature microhotplates

摘要

This paper presents a fabrication process for high-temperature MEMS microhotplates that uses sputtered molybdenum as a conductive material. Molybdenum has a high melting point (2693°C bulk) and is simpler to deposit and pattern in larger series than platinum. Molybdenum is sensitive to oxidation above 300°C, so during fabrication it is protected by PECVD silicon oxide and then covered by LPCVD SiN. The electrical resistivity is linear with the temperature up to 700°C at least. Molybdenum microhotplate has a higher maximum operating temperature than platinum which is demonstrated by the observation of the boiling of barium carbonate (BaCO3) microcrystals at 1360°C. Annealing at 1100°C is effective in extending the operating range. The molybdenum microhotplate performs far better than platinum also in terms of long-term resistance drift.