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Saw-Pirani vacuum sensor with a new functioning mode and a fast response time

机译:SAW-Pirani真空传感器,具有新的功能模式和快速响应时间

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A Surface Acoustic Wave (SAW) Pirani vacuum sensor has been fabricated on a lithium niobate substrate and mounted on a printed circuit board. The pressure range of the sensor is at the state of the art, it is 10−5 mbar up to atmospheric pressure with a good sensitivity. Two functioning modes of the transducer have been tested and compared in term of sensitivity and response time. By changing the functioning mode of the sensor, it is shown in this paper that the response time can be divided by 60.
机译:表面声波(锯)Pirani真空传感器已经在铌酸锂基板上制造并安装在印刷电路板上。 传感器的压力范围位于现有技术,它是10 − 5 mbar,直到大气压,敏感性良好。 在灵敏度和响应时间的术语中已经测试并比较了换能器的两种功能模式。 通过改变传感器的功能模式,在本文中示出了响应时间可以除以60。

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