We demonstrate the fabrication and initial testing of a novel micromachined Thermoelectric Nanowire Characterization Platform (TNCP) which will be applied to measure the thermoelectric properties of a single thermoelectric nanowire. The assembly of the nanowire onto the TNCP is conducted by means of dielectrophoresis (DEP) in combination with a controlled deposition and evaporation of a liquid sample containing nanowires. This paper presents the design of the TNCP with integrated sensors and DEP electrodes, methods of surface modification for a controlled deposition and evaporation and a successful nanowire deposition.
展开▼