Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller

摘要

This work demonstrates a novel control strategy for the drive mode of a MEMS gyroscope using ascending frequency drive with AGC-2DOF PID controller instead of resonant frequency drive. It can suppress the electrical coupling from the drive electrodes to the sense electrodes, reduce the low frequency noise and improve the transient response by using 2DOF PID controller. Test results indicate the electrical antiresonance peak is eliminated and the resonant peak height increases approximate 10dB over 400Hz span with a flicker noise reduction of 30dB within 100Hz. The percent overshoot is reduced from 36.2% (1DOF PID) to 8.95% (2DOF PID) with 15.3% improved in setting time. The scale factor is measured to be 5.6mv/deg/s with nonlinearity about 0.95% in the full range of 800deg/s.